Atomic-Level Polishing: Making Josephson Junctions Identical ✛ ✎

Original: "Fabrication And Characterization Of High-Quality Nb/Al-AlO$$_x$$/Nb Cross-Type Josephson Tunnel Junctions Utilising CMP-based Planarisation Techniques"
arXiv:2609.08569v1 · 2026-09-08 · arXiv non-exclusive · independent analysis · 2 min
Chemical-mechanical polishing replaces lift-off lithography and boosts the yield of Josephson junctions to 90%.

You don't build a road by demolishing neighboring houses: first you lay the asphalt, then you grind away the excess, leaving a smooth surface. That's roughly what physicists in Heidelberg did when they took on the production of Josephson junctions, tiny sandwiches of superconductor and insulator through which current flows without resistance. Previously, such junctions were made by lifting off a protective mask, like demolishing buildings to clear space for a road. That was slow and left ragged edges.

A Josephson junction consists of two pieces of superconductor separated by a thin insulating layer. Current flows through it via quantum tunneling, and the junction acts as an ultra-precise switch.

In the new work, they don't demolish the road; they polish it. They deposit a trilayer structure onto a silicon wafer: niobium, aluminum with its oxide, and niobium again. On top, they pour silicon dioxide, like asphalt, and polish it until the top electrode emerges. The polishing pressure is only 138 millibar, about like a breath of wind on your palm, yet it removes 128 nanometers of silicon dioxide per minute. The result is a smooth surface without ragged edges.

The result is impressive: the yield of working junctions exceeded 90% on a wafer. For junctions with a 200-nanometer-thick top electrode, all tested samples were of high quality. The critical current scales linearly with area, and the critical current density was 220±5 A/cm² for one wafer and 549±4 A/cm² for another. Such uniformity is rare in mass production.

The critical current is the maximum current that a junction can carry without resistance. If the current exceeds that, the junction becomes an ordinary resistor.

Polishing instead of lift-off is like grinding the road rather than demolishing buildings. Previously, to make cross-type junctions, you had to lift off the mask, leaving burrs at the edges that degraded performance. Now, excess silicon dioxide is ground away without touching the junction itself. This speeds up the process and makes it suitable for multilayer integration of superconducting circuits. The method can already be adopted in the production of SQUIDs and superconducting qubits, which require large arrays of uniform junctions.

The road, polished to a shine, leads to quantum computers. The uniformity of junctions directly affects the spread of qubit frequencies, and hence the quality of quantum circuits. The physicists from Heidelberg have shown that such junctions can be made quickly and reliably, without ragged edges. All that remains is to remove the polishing dust, so the road becomes perfect even for the smallest junctions.

The pressure during polishing is only 138 mbar, about the force of a gentle breeze on your palm, yet it is enough to remove 128 nanometers of silicon dioxide per minute.

In the TV series 'The Expanse', ships use superconducting magnetic fields for radiation shielding. Josephson junctions are key components in sensors for such fields, and their mass production brings science fiction closer to reality.

I_{JJ} = \frac{V_{diff} - V_{JJ}}{R_1 + R_{filter}}
The current through the junction equals the voltage difference between the differential amplifier and the junction, divided by the sum of the resistor R1 and the filter resistance.
I_c = j_c \cdot A_{JJ}
The critical current is proportional to the junction area, with the proportionality constant being the critical current density.
t_B = \frac{\Phi_0}{B_{min} \cdot L}
The magnetic thickness equals the magnetic flux quantum divided by the product of the field at the first minimum and the junction width.
Concepts
aluminum oxide transmon qubit josephson current Josephson effect tunnel junction