process

sputtering

A physical vapor deposition method where atoms are ejected from a target by plasma bombardment.
18 related articles

Description

Sputtering is a physical vapor deposition technique used to create thin films of material on a substrate. In a vacuum chamber, a plasma is generated near a target material, and the energetic ions from this plasma bombard the target, knocking out atoms through momentum transfer. These ejected atoms then travel and condense onto a substrate, forming a thin, uniform coating.

History

The phenomenon was first observed in 1852 by William Robert Grove, who noticed material being ejected from a cathode during electrical discharge experiments. It became a practical deposition technique in the mid-20th century.

How it works

A voltage is applied between the target (cathode) and the chamber, ionizing a process gas (typically argon) into a plasma. The positively charged argon ions are accelerated toward the negatively charged target. Upon impact, they collide with target atoms in a cascade, transferring enough energy to eject surface atoms. These sputtered atoms deposit onto the substrate, building up the film atom by atom. The process can be enhanced with magnetic fields (magnetron sputtering) to increase plasma density and deposition rate.

In practice

Widely used in semiconductor manufacturing to deposit metal interconnects, in optics for anti-reflective coatings, and in data storage for magnetic thin films.

Fun fact

Sputtering is the same process that slowly erodes the walls of fusion reactors, where plasma ions bombard the containment vessel — a major engineering challenge for future power plants.

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Related articles · 18

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A Tiny Lightbulb That Deposits Iron Atoms onto a Perfect Surface
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Boron Film for the Fusion Furnace
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A Stack of Prisms Catches X-rays
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physics.acc-ph2026-01-201 minarXiv:2601.13517express
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A Robot That Grows Films and Watches Them Get Wet
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Quantum Gases2026-01-081 minarXiv:2601.04662express
How a Pair of Particles Bounces Off a Wall
Two particles cling to each other like climbers on the same rope and fly toward a wall. When they hit, will they bounce off together, or will the rope snap? What does it depend on? Physicists considered the simplest case: everything happens on a single line, the particles attract only when they occupy the same point, and the wall is perfectly rigid.
Bragg Scattering from a Few Atoms: How a Tweezer Array Controls Light
Four cesium atoms hang in vacuum, held by laser tweezers like beads on an invisible thread. Around them is a ring resonator, a closed loop of mirrors where light circulates without obstacles. When a probe beam strikes this tiny chain, something strange happens: the atoms scatter light not uniformly in all directions, but predominantly in one direction.